Architecture and Process Integration Overview of 3D NAND Flash Technologies

نویسندگان

چکیده

In the past few decades, NAND flash memory has been one of most successful nonvolatile storage technologies, and it is commonly used in electronic devices because its high scalability reliable switching properties. To overcome scaling limit planar arrays, various three-dimensional (3D) architectures their process integration methods have investigated both industry academia adopted commercial mass production. this paper, 3D technologies are reviewed terms architecture fabrication methods, advantages disadvantages compared.

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ژورنال

عنوان ژورنال: Applied sciences

سال: 2021

ISSN: ['2076-3417']

DOI: https://doi.org/10.3390/app11156703